X-ray reflection from self-organized interfaces in a SiGe/Si multilayer

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Semiconductor Science and Technology
Publication status	Published - 1999

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

@article{97a33ed89c03481caf74434344a7d222,

title = "X-ray reflection from self-organized interfaces in a SiGe/Si multilayer",

author = "G{\"u}nther Bauer and Darhuber, \{A. A.\} and J. Grim and Vaclav Holy and J. Kubena and Stefan Zerlauth",

year = "1999",

language = "English",

journal = "Semiconductor Science and Technology",

publisher = "IOP Publishing",

}