@article{c4055b8e47cf4f458553b83fbd0b2608,
title = "X-Ray Investigation of Buried SiGe Islands for Devices with Strain-Enhanced Mobility",
author = "Nina Hrauda and Jianjun Zhang and Julian Stangl and \{Rehman Khan\}, Aaliya and G{\"u}nther Bauer and Mathieu Stoffel and Schmidt, \{Oliver G.\} and Vladimir Jovanovic and Nanver, \{Lis K.\}",
year = "2009",
doi = "10.1116/1.3056178",
language = "English",
volume = "27",
pages = "912--918",
journal = "Journal of Vacuum Science and Technology B",
issn = "1520-8567",
number = "2",
}