X-Ray Investigation of Buried SiGe Islands for Devices with Strain-Enhanced Mobility

Nina Hrauda, Jianjun Zhang, Julian Stangl, Aaliya Rehman Khan, Günther Bauer, Mathieu Stoffel, Oliver G. Schmidt, Vladimir Jovanovic, Lis K. Nanver

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)912-918
Number of pages7
JournalJournal of Vacuum Science and Technology B
Volume27
Issue number2
DOIs
Publication statusPublished - 2009

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 103040 Photonics
  • 202032 Photovoltaics
  • 210006 Nanotechnology

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