@article{2c533bb73c3e4b0683393f15fef7149c,
title = "X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires",
author = "Anke Hesse and Y. Zhuang and Vaclav Holy and Julian Stangl and Stefan Zerlauth and Friedrich Sch{\"a}ffler and G{\"u}nther Bauer and N. Darowski and U. Pietsch",
year = "2003",
month = jan,
doi = "10.1016/S0168-583X(02)01688-9",
language = "English",
volume = "200",
pages = "267--272",
journal = "Nuclear Instruments and Methods in Physics Research Section B",
issn = "1872-9584",
publisher = "Elsevier",
}