@article{fc616d909b46426e845d27543ec36667,
title = "Wafer-to-wafer fusion bonding of oxidized silicon to silicon at low temperatures",
keywords = "Fusion bonding, Low-temperature bonding, Oxide-to-silicon bonding",
author = "Axel Berthold and Bernard Jakoby and Vellekoop, \{Michael J.\}",
year = "1998",
month = jun,
day = "15",
doi = "10.1016/S0924-4247(98)00028-4",
language = "English",
volume = "68",
pages = "410--413",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1-3",
}