Wafer Bonding of Plasma Activated Surfaces

Thomas Plach, V. Dragoi, Gerald Mittendorfer, Markus Wimplinger, Kurt Hingerl

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	39-45
Number of pages	7
Journal	ECS Transactions - Electrochemical Society
Volume	13
DOIs	https://doi.org/10.1149/ma2008-01/38/1221
Publication status	Published - 2008

Fields of science

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title = "Wafer Bonding of Plasma Activated Surfaces",

author = "Thomas Plach and V. Dragoi and Gerald Mittendorfer and Markus Wimplinger and Kurt Hingerl",

year = "2008",

doi = "10.1149/ma2008-01/38/1221",

language = "English",

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pages = "39--45",

journal = "ECS Transactions - Electrochemical Society",

issn = "1938-5862",

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TY - JOUR

T1 - Wafer Bonding of Plasma Activated Surfaces

AU - Plach, Thomas

AU - Dragoi, V.

AU - Mittendorfer, Gerald

AU - Wimplinger, Markus

AU - Hingerl, Kurt

PY - 2008

Y1 - 2008

U2 - 10.1149/ma2008-01/38/1221

DO - 10.1149/ma2008-01/38/1221

M3 - Article

SN - 1938-5862

VL - 13

SP - 39

EP - 45

JO - ECS Transactions - Electrochemical Society

JF - ECS Transactions - Electrochemical Society

ER -