Virtual interface approximation model applied to spectroscopic ellipsometry for on-line composition determination of metal-organic chemical vapor deposition grown ternary nitrides

Kurt Hingerl; Alberta Bonanni; David Stifter; Alberto Montaigne Ramil; Helmut Sitter; Klaus Schmidegg

doi:10.1116/1.1585078

Virtual interface approximation model applied to spectroscopic ellipsometry for on-line composition determination of metal-organic chemical vapor deposition grown ternary nitrides

Kurt Hingerl, Alberta Bonanni, David Stifter, Alberto Montaigne Ramil, Helmut Sitter, Klaus Schmidegg

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1825
Journal	Journal of Vacuum Science and Technology B
Volume	B21(4)
DOIs	https://doi.org/10.1116/1.1585078
Publication status	Published - 2003

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
210006 Nanotechnology
103040 Photonics
202032 Photovoltaics

Access to Document

10.1116/1.1585078

Cite this

@article{dbff4a2e2ba14d2da7ef072ee800ae0c,

title = "Virtual interface approximation model applied to spectroscopic ellipsometry for on-line composition determination of metal-organic chemical vapor deposition grown ternary nitrides",

author = "Kurt Hingerl and Alberta Bonanni and David Stifter and \{Montaigne Ramil\}, Alberto and Helmut Sitter and Klaus Schmidegg",

year = "2003",

doi = "10.1116/1.1585078",

language = "English",

volume = "B21(4)",

pages = "1825",

journal = "Journal of Vacuum Science and Technology B",

issn = "1520-8567",

}

Hingerl, K , Bonanni, A , Stifter, D, Montaigne Ramil, A, Sitter, H & Schmidegg, K 2003, 'Virtual interface approximation model applied to spectroscopic ellipsometry for on-line composition determination of metal-organic chemical vapor deposition grown ternary nitrides', Journal of Vacuum Science and Technology B, vol. B21(4), pp. 1825. https://doi.org/10.1116/1.1585078

Virtual interface approximation model applied to spectroscopic ellipsometry for on-line composition determination of metal-organic chemical vapor deposition grown ternary nitrides. / Hingerl, Kurt ; Bonanni, Alberta ; Stifter, David et al.
In: Journal of Vacuum Science and Technology B, Vol. B21(4), 2003, p. 1825.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Virtual interface approximation model applied to spectroscopic ellipsometry for on-line composition determination of metal-organic chemical vapor deposition grown ternary nitrides

AU - Hingerl, Kurt

AU - Bonanni, Alberta

AU - Stifter, David

AU - Montaigne Ramil, Alberto

AU - Sitter, Helmut

AU - Schmidegg, Klaus

PY - 2003

Y1 - 2003

U2 - 10.1116/1.1585078

DO - 10.1116/1.1585078

M3 - Article

SN - 1520-8567

VL - B21(4)

SP - 1825

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

ER -