Verification of Models for the Simulation of Boron Implantation into Crystalline Silicon

G. Hobler; A. Simionescu; Leopold Palmetshofer; F. Jahnel; R. von Criegern; C. Tian; G. Stingeder

Verification of Models for the Simulation of Boron Implantation into Crystalline Silicon

G. Hobler
, A. Simionescu
, Leopold Palmetshofer
, F. Jahnel
, R. von Criegern
, C. Tian
, G. Stingeder

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings

Original language	English
Title of host publication	Proceedings of the 3rd International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors
Number of pages	6
Publication status	Published - 1995

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
210006 Nanotechnology
103040 Photonics
202032 Photovoltaics

Cite this

@inproceedings{fab9ab2da93c44a79b723f8f60e0fda8,

title = "Verification of Models for the Simulation of Boron Implantation into Crystalline Silicon",

author = "G. Hobler and A. Simionescu and Leopold Palmetshofer and F. Jahnel and \{von Criegern\}, R. and C. Tian and G. Stingeder",

year = "1995",

language = "English",

booktitle = "Proceedings of the 3rd International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors",

}

Verification of Models for the Simulation of Boron Implantation into Crystalline Silicon. / Hobler, G.; Simionescu, A.; Palmetshofer, Leopold et al.
Proceedings of the 3rd International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors. 1995.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings

TY - GEN

T1 - Verification of Models for the Simulation of Boron Implantation into Crystalline Silicon

AU - Hobler, G.

AU - Simionescu, A.

AU - Palmetshofer, Leopold

AU - Jahnel, F.

AU - von Criegern, R.

AU - Tian, C.

AU - Stingeder, G.

PY - 1995

Y1 - 1995

M3 - Conference proceedings

BT - Proceedings of the 3rd International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors

ER -