UV nanoimprint lithography for the realization of large-area ordered SiGe/Si(001) island arrays

Elisabeth Lausecker; Moritz Brehm; Martyna Justyna Grydlik; Florian Hackl; Iris Bergmair; Michael Mühlberger; Thomas Fromherz; Friedrich Schäffler; Günther Bauer

doi:10.1063/1.3575554

UV nanoimprint lithography for the realization of large-area ordered SiGe/Si(001) island arrays

Elisabeth Lausecker, Moritz Brehm, Martyna Justyna Grydlik, Florian Hackl, Iris Bergmair, Michael Mühlberger, Thomas Fromherz, Friedrich Schäffler, Günther Bauer

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	143101
Pages (from-to)	143101
Number of pages	3
Journal	Applied Physics Letters
Volume	98
Issue number	14
DOIs	https://doi.org/10.1063/1.3575554
Publication status	Published - 2011

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
103040 Photonics
202032 Photovoltaics
210006 Nanotechnology

JKU Focus areas

Nano-, Bio- and Polymer-Systems: From Structure to Function

Access to Document

10.1063/1.3575554

Cite this

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title = "UV nanoimprint lithography for the realization of large-area ordered SiGe/Si(001) island arrays",

author = "Elisabeth Lausecker and Moritz Brehm and Grydlik, {Martyna Justyna} and Florian Hackl and Iris Bergmair and Michael M{\"u}hlberger and Thomas Fromherz and Friedrich Sch{\"a}ffler and G{\"u}nther Bauer",

year = "2011",

doi = "10.1063/1.3575554",

language = "English",

volume = "98",

pages = "143101",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "14",

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TY - JOUR

T1 - UV nanoimprint lithography for the realization of large-area ordered SiGe/Si(001) island arrays

AU - Lausecker, Elisabeth

AU - Brehm, Moritz

AU - Grydlik, Martyna Justyna

AU - Hackl, Florian

AU - Bergmair, Iris

AU - Mühlberger, Michael

AU - Fromherz, Thomas

AU - Schäffler, Friedrich

AU - Bauer, Günther

PY - 2011

Y1 - 2011

U2 - 10.1063/1.3575554

DO - 10.1063/1.3575554

M3 - Article

SN - 0003-6951

VL - 98

SP - 143101

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 14

M1 - 143101

ER -