UV-laser-induced surface topology changes in polyimide

Manfred Himmelbauer; Enno Arenholz; Dieter Bäuerle; K. Schilcher

doi:10.1007/BF01567323

UV-laser-induced surface topology changes in polyimide

Manfred Himmelbauer, Enno Arenholz, Dieter Bäuerle, K. Schilcher

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	337-339
Number of pages	3
Journal	Applied Physics A
Volume	63
Issue number	4
DOIs	https://doi.org/10.1007/BF01567323
Publication status	Published - Oct 1996

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

Access to Document

10.1007/BF01567323

Cite this

@article{a792bf4e65724f5592ac830ce9911119,

title = "UV-laser-induced surface topology changes in polyimide",

author = "Manfred Himmelbauer and Enno Arenholz and Dieter B{\"a}uerle and K. Schilcher",

year = "1996",

month = oct,

doi = "10.1007/BF01567323",

language = "English",

volume = "63",

pages = "337--339",

journal = "Applied Physics A",

issn = "1432-0630",

publisher = "Springer Verlag",

number = "4",

}

TY - JOUR

T1 - UV-laser-induced surface topology changes in polyimide

AU - Himmelbauer, Manfred

AU - Arenholz, Enno

AU - Bäuerle, Dieter

AU - Schilcher, K.

PY - 1996/10

Y1 - 1996/10

UR - https://www.scopus.com/pages/publications/0030264298

U2 - 10.1007/BF01567323

DO - 10.1007/BF01567323

M3 - Article

SN - 1432-0630

VL - 63

SP - 337

EP - 339

JO - Applied Physics A

JF - Applied Physics A

IS - 4

ER -

UV-laser-induced surface topology changes in polyimide

Fields of science

JKU Focus areas

Access to Document

Other files and links

Cite this