UV-laser-induced polymer ablation: The role of volatile species

Manfred Himmelbauer; Nikita Bityurin; Boris Luk'yanchuk; Nikita Arnold; Dieter Bäuerle

doi:10.1117/12.271677

UV-laser-induced polymer ablation: The role of volatile species

Manfred Himmelbauer
, Nikita Bityurin
, Boris Luk'yanchuk
, Nikita Arnold
, Dieter Bäuerle

Institute of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Nonresonant Laser-Matter Interaction (NLMI-9)
Editors	V.I. Konov, M.N. Libenson
Pages	220-224
Number of pages	5
Volume	3093
DOIs	https://doi.org/10.1117/12.271677
Publication status	Published - 1997

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3093
ISSN (Print)	0277-786X

Fields of science

103016 Laser physics
210005 Nanophotonics

JKU Focus areas

Engineering and Natural Sciences (in general)

Access to Document

10.1117/12.271677

Cite this

Himmelbauer, M., Bityurin, N., Luk'yanchuk, B., Arnold, N., & Bäuerle, D. (1997). UV-laser-induced polymer ablation: The role of volatile species. In V. I. Konov, & M. N. Libenson (Eds.), Nonresonant Laser-Matter Interaction (NLMI-9) (Vol. 3093, pp. 220-224). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 3093). https://doi.org/10.1117/12.271677

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title = "UV-laser-induced polymer ablation: The role of volatile species",

author = "Manfred Himmelbauer and Nikita Bityurin and Boris Luk'yanchuk and Nikita Arnold and Dieter B{\"a}uerle",

year = "1997",

doi = "10.1117/12.271677",

language = "English",

isbn = "0819425087",

volume = "3093",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

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editor = "V.I. Konov and M.N. Libenson",

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UV-laser-induced polymer ablation: The role of volatile species. / Himmelbauer, Manfred; Bityurin, Nikita; Luk'yanchuk, Boris et al.
Nonresonant Laser-Matter Interaction (NLMI-9). ed. / V.I. Konov; M.N. Libenson. Vol. 3093 1997. p. 220-224 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 3093).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - UV-laser-induced polymer ablation: The role of volatile species

AU - Himmelbauer, Manfred

AU - Bityurin, Nikita

AU - Luk'yanchuk, Boris

AU - Arnold, Nikita

AU - Bäuerle, Dieter

PY - 1997

Y1 - 1997

UR - https://www.scopus.com/pages/publications/0031346584

U2 - 10.1117/12.271677

DO - 10.1117/12.271677

M3 - Conference proceedings

SN - 0819425087

VL - 3093

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 220

EP - 224

BT - Nonresonant Laser-Matter Interaction (NLMI-9)

A2 - Konov, V.I.

A2 - Libenson, M.N.

ER -

UV-laser-induced polymer ablation: The role of volatile species

Publication series

Fields of science

JKU Focus areas

Access to Document

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Cite this