Ultraviolet Nanoimprint Lithography for Silicon-based Integrated Photonics

  • Lukas David Häusler

Research output: ThesisMaster's / Diploma thesis

Original languageEnglish
Publication statusPublished - Dec 2013

Fields of science

  • 103026 Quantum optics
  • 103009 Solid state physics
  • 103 Physics, Astronomy
  • 103011 Semiconductor physics
  • 202018 Semiconductor electronics
  • 210006 Nanotechnology

JKU Focus areas

  • Nano-, Bio- and Polymer-Systems: From Structure to Function

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