Abstract
This contribution gives an overview of the design and development of miniaturized, tunable resonating viscosity sensors in the low kHz range incorporating first modeling approaches as well as experimental results. The effect of different designs, potential improvements in the setups as well as the effect of cross sensitivities are discussed and outlined.
Original language | English |
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Pages (from-to) | 111-117 |
Number of pages | 7 |
Journal | Sensors and Actuators A: Physical |
Volume | 186 |
DOIs | |
Publication status | Published - Oct 2012 |
Fields of science
- 203017 Micromechanics
- 202019 High frequency engineering
- 202028 Microelectronics
- 202039 Theoretical electrical engineering
- 202037 Signal processing
- 202027 Mechatronics
- 202036 Sensor systems
JKU Focus areas
- Mechatronics and Information Processing