Transmission and reflection mode scanning microwave microscopy (SMM): experiments, calibration, and simulations

Pablo F. Medina; A. Lucibello; Georg Gramse; Enrico Brinciotti; Manuel Kasper; A. O. Oladipo; Reinhard Feger; Andreas Stelzer; Hassan Tanbakuchi; Roger Stancliff; Emanuela Proietti; Romolo Marcelli; Ferry Kienberger

Transmission and reflection mode scanning microwave microscopy (SMM): experiments, calibration, and simulations

Pablo F. Medina, A. Lucibello, Georg Gramse, Enrico Brinciotti, Manuel Kasper, A. O. Oladipo, Reinhard Feger, Andreas Stelzer, Hassan Tanbakuchi, Roger Stancliff, Emanuela Proietti, Romolo Marcelli, Ferry Kienberger

Department of RF-Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

Reflection mode scanning microwave microscopy (SMM) is compared to a newly developed transmission mode imaging hardware for extended scattering S11 and S12 measurements. Transmission mode imaging is realized by an SMA connector placed below the sample to excite an electromagnetic wave towards the cantilever acting as nanoscale- sized receiver structure. The frequency response was investigated between 1-20 GHz and a circuitry model of the SMM matching network was combined with a 3D finite element model of the tip-sample system. Modeling results include the local 3D electric field distribution around the nanoscale cantilever tip in contact to the sample. Reflection mode measurements were calibrated using a simple three error-parameter workflow allowing for quantitative impedance and capacitance imaging. A qualitative agreement was obtained between measurements and SMM models for both S11 and S12.

Original language	English
Title of host publication	Proc. of 45th European Microwave Conference
Pages	654 - 657
Number of pages	4
Publication status	Published - Oct 2015

Fields of science

202019 High frequency engineering
202029 Microwave engineering
202033 Radar technology
202 Electrical Engineering, Electronics, Information Engineering

JKU Focus areas

Mechatronics and Information Processing

Cite this

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title = "Transmission and reflection mode scanning microwave microscopy (SMM): experiments, calibration, and simulations",

abstract = "Reflection mode scanning microwave microscopy (SMM) is compared to a newly developed transmission mode imaging hardware for extended scattering S11 and S12 measurements. Transmission mode imaging is realized by an SMA connector placed below the sample to excite an electromagnetic wave towards the cantilever acting as nanoscale- sized receiver structure. The frequency response was investigated between 1-20 GHz and a circuitry model of the SMM matching network was combined with a 3D finite element model of the tip-sample system. Modeling results include the local 3D electric field distribution around the nanoscale cantilever tip in contact to the sample. Reflection mode measurements were calibrated using a simple three error-parameter workflow allowing for quantitative impedance and capacitance imaging. A qualitative agreement was obtained between measurements and SMM models for both S11 and S12.",

author = "Medina, \{Pablo F.\} and A. Lucibello and Georg Gramse and Enrico Brinciotti and Manuel Kasper and Oladipo, \{A. O.\} and Reinhard Feger and Andreas Stelzer and Hassan Tanbakuchi and Roger Stancliff and Emanuela Proietti and Romolo Marcelli and Ferry Kienberger",

year = "2015",

month = oct,

language = "English",

pages = "654 -- 657",

booktitle = "Proc. of 45th European Microwave Conference",

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TY - GEN

T1 - Transmission and reflection mode scanning microwave microscopy (SMM): experiments, calibration, and simulations

AU - Medina, Pablo F.

AU - Lucibello, A.

AU - Gramse, Georg

AU - Brinciotti, Enrico

AU - Kasper, Manuel

AU - Oladipo, A. O.

AU - Feger, Reinhard

AU - Stelzer, Andreas

AU - Tanbakuchi, Hassan

AU - Stancliff, Roger

AU - Proietti, Emanuela

AU - Marcelli, Romolo

AU - Kienberger, Ferry

PY - 2015/10

Y1 - 2015/10

N2 - Reflection mode scanning microwave microscopy (SMM) is compared to a newly developed transmission mode imaging hardware for extended scattering S11 and S12 measurements. Transmission mode imaging is realized by an SMA connector placed below the sample to excite an electromagnetic wave towards the cantilever acting as nanoscale- sized receiver structure. The frequency response was investigated between 1-20 GHz and a circuitry model of the SMM matching network was combined with a 3D finite element model of the tip-sample system. Modeling results include the local 3D electric field distribution around the nanoscale cantilever tip in contact to the sample. Reflection mode measurements were calibrated using a simple three error-parameter workflow allowing for quantitative impedance and capacitance imaging. A qualitative agreement was obtained between measurements and SMM models for both S11 and S12.

AB - Reflection mode scanning microwave microscopy (SMM) is compared to a newly developed transmission mode imaging hardware for extended scattering S11 and S12 measurements. Transmission mode imaging is realized by an SMA connector placed below the sample to excite an electromagnetic wave towards the cantilever acting as nanoscale- sized receiver structure. The frequency response was investigated between 1-20 GHz and a circuitry model of the SMM matching network was combined with a 3D finite element model of the tip-sample system. Modeling results include the local 3D electric field distribution around the nanoscale cantilever tip in contact to the sample. Reflection mode measurements were calibrated using a simple three error-parameter workflow allowing for quantitative impedance and capacitance imaging. A qualitative agreement was obtained between measurements and SMM models for both S11 and S12.

M3 - Conference proceedings

SP - 654

EP - 657

BT - Proc. of 45th European Microwave Conference

ER -