TY - GEN
T1 - Transient Measurement Method for the Thermal Properties of the Thin-Film Membrane in a Multi-Parameter Wind Sensor
AU - Beigelbeck, Roman
AU - Cerimovic, Samir
AU - Kohl, Franz
AU - Voglhuber-Brunnmaier, Thomas
AU - Jakoby, Bernhard
AU - Reyes-Romero, D.
AU - Urban, G.A.
PY - 2014/12/12
Y1 - 2014/12/12
N2 - The performance of our previously devised thermal multi-parameter wind sensor for gaseous fluids is noticeably influenced by the thermal heat shunt induced by the thin-film membrane where heating and temperature sensing elements are embedded. Consequently, reliable values for the thermal parameters of the thin-film membrane are mandatory for their design and characterization. We present a new method to determine the
thermal conductivity, thermal diffusivity, and average spectral emissivity of the thin-film membrane. Compared to commonly used measurement techniques for these thermal thin-film parameters, our method does not require custom-built specimens, i. e., the results can be obtained from transient excess temperature measurements carried out directly on the wind sensor device. We describe the theoretical background of this method, provide an efficient analytical model for the data evaluation including its validation by computer numerical analyses, and showcase sample measurements on multi-layer SixNy-SiO2 thin films.
AB - The performance of our previously devised thermal multi-parameter wind sensor for gaseous fluids is noticeably influenced by the thermal heat shunt induced by the thin-film membrane where heating and temperature sensing elements are embedded. Consequently, reliable values for the thermal parameters of the thin-film membrane are mandatory for their design and characterization. We present a new method to determine the
thermal conductivity, thermal diffusivity, and average spectral emissivity of the thin-film membrane. Compared to commonly used measurement techniques for these thermal thin-film parameters, our method does not require custom-built specimens, i. e., the results can be obtained from transient excess temperature measurements carried out directly on the wind sensor device. We describe the theoretical background of this method, provide an efficient analytical model for the data evaluation including its validation by computer numerical analyses, and showcase sample measurements on multi-layer SixNy-SiO2 thin films.
UR - http://www.scopus.com/inward/record.url?scp=84928676793&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2014.6985250
DO - 10.1109/ICSENS.2014.6985250
M3 - Conference proceedings
T3 - Proceedings of IEEE Sensors
SP - 1304
EP - 1307
BT - Proceedings IEEE Sensors
A2 - Arregui, Francisco J.
ER -
