Transient-enhanced surface diffusion on native-oxide-covered Si(001) nano-structures during vacuum annealing

Friedrich Schäffler, Michael Mühlberger, Herbert Lichtenberger

Research output: Contribution to journal › Article › peer-review

Fields of science

@article{5db7b5eddcde4adab322d510f05b6514,

title = "Transient-enhanced surface diffusion on native-oxide-covered Si(001) nano-structures during vacuum annealing",

author = "Friedrich Sch{\"a}ffler and Michael M{\"u}hlberger and Herbert Lichtenberger",

year = "2003",

doi = "10.1063/1.1577391",

language = "English",

volume = "82",

pages = "3650--3652",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "21",

}

TY - JOUR

T1 - Transient-enhanced surface diffusion on native-oxide-covered Si(001) nano-structures during vacuum annealing

AU - Schäffler, Friedrich

AU - Mühlberger, Michael

AU - Lichtenberger, Herbert

PY - 2003

Y1 - 2003

U2 - 10.1063/1.1577391

DO - 10.1063/1.1577391

M3 - Article

SN - 0003-6951

VL - 82

SP - 3650

EP - 3652

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 21

ER -