Transient-enhanced Si diffusion on natural-oxide-covered Si(001) nano-structures during vacuum annealing

Friedrich Schäffler, Herbert Lichtenberger, Christoph Schelling, S. Senz, Michael Mühlberger, Wolfgang Schwinger

Research output: Contribution to journal › Article › peer-review

Original language	English
Number of pages	7
Journal	Physica E: Low-dimensional Systems and Nanostructures
Volume	23
DOIs	https://doi.org/10.1016/j.physe.2004.03.015
Publication status	Published - 2004

Fields of science

@article{1d18787d46264af8985b2b9d3ac011ec,

title = "Transient-enhanced Si diffusion on natural-oxide-covered Si(001) nano-structures during vacuum annealing",

author = "Friedrich Sch{\"a}ffler and Herbert Lichtenberger and Christoph Schelling and S. Senz and Michael M{\"u}hlberger and Wolfgang Schwinger",

year = "2004",

doi = "10.1016/j.physe.2004.03.015",

language = "English",

volume = "23",

journal = "Physica E: Low-dimensional Systems and Nanostructures",

issn = "1386-9477",

publisher = "Elsevier",

}

TY - JOUR

T1 - Transient-enhanced Si diffusion on natural-oxide-covered Si(001) nano-structures during vacuum annealing

AU - Schäffler, Friedrich

AU - Lichtenberger, Herbert

AU - Schelling, Christoph

AU - Senz, S.

AU - Mühlberger, Michael

AU - Schwinger, Wolfgang

PY - 2004

Y1 - 2004

U2 - 10.1016/j.physe.2004.03.015

DO - 10.1016/j.physe.2004.03.015

M3 - Article

SN - 1386-9477

VL - 23

JO - Physica E: Low-dimensional Systems and Nanostructures

JF - Physica E: Low-dimensional Systems and Nanostructures

ER -