Thermische Kopplungseigenschaften von Gitterkopplern als zentrales Element eines IR-Absorptionssensors

Miniaturized IR-spectrometers enable the online monitoring of various industrial processes. Since the mid- IR-region is used to determine the chemical composition of fluids, we propose a fully integrated absorption sensor based on IR-absorption in the evanescent field region of an integrated waveguide utilizing thermally generated and detected IR-radiation. Two grating couplers are employed to couple IR-radiation into the waveguide and the attenuated IR-radiation towards a thermal IR-detector. In this contribution, we present detailed considerations concerning the design and the behavior of grating couplers, which are applied to broadband non-polarized thermal radiation.