Abstract
Binary and ternary composition spread material libraries were prepared using a thermal physical vapor deposition system with three separated heating sources and adjustable chamber geometry. In this work, we present binary Cu84-20Al16-80 and Zn71-8Mg29-92 libraries as well as a ternary Cu67-6Ag81-13Mg66-12 system with a thickness around 300 nm. The composition of the obtained films was determined by automated energy dispersive X-ray spectroscopy and the data further used to develop a mathematical model to simulate the surface. The thickness of a copper film was measured by atomic force microscopy and used to verify the theoretical model, whereas topography scans provided information on the surface roughness. The consistency between theoretical simulations and observed compositions concludes multiple source thermal co-evaporation to be a reliable method with high variety regarding source metals and deposition rates and therefore of high value for material library fabrication.
| Original language | English |
|---|---|
| Pages (from-to) | 801-806 |
| Number of pages | 6 |
| Journal | Physica Status Solidi A: Applications and Materials Science |
| Volume | 207 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Apr 2010 |
Fields of science
- 104005 Electrochemistry
- 104006 Solid state chemistry
- 104014 Surface chemistry
- 104017 Physical chemistry
- 105113 Crystallography
- 105116 Mineralogy
- 503013 Subject didactics of natural sciences
- 204 Chemical Process Engineering
- 204001 Inorganic chemical technology
- 205016 Materials testing
- 210006 Nanotechnology
- 211104 Metallurgy
JKU Focus areas
- Engineering and Natural Sciences (in general)