Surface Modification of Fluorocarbon Polymers by Vacuum-UV Excimer Lamp Irradiation in Reactive Gas Atmosphere

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	4110
Number of pages	7
Journal	Japanese Journal of Applied Physics
Volume	35
Issue number	7R
DOIs	https://doi.org/10.1143/JJAP.35.4110
Publication status	Published - 1996

Fields of science

@article{285370971378499cb07347c6c2d4921c,

title = "Surface Modification of Fluorocarbon Polymers by Vacuum-UV Excimer Lamp Irradiation in Reactive Gas Atmosphere",

author = "Johannes Heitz and H. Niino and A. Yabe",

year = "1996",

doi = "10.1143/JJAP.35.4110",

language = "English",

volume = "35",

pages = "4110",

journal = "Japanese Journal of Applied Physics",

issn = "1347-4065",

number = "7R",

}

TY - JOUR

T1 - Surface Modification of Fluorocarbon Polymers by Vacuum-UV Excimer Lamp Irradiation in Reactive Gas Atmosphere

AU - Heitz, Johannes

AU - Niino, H.

AU - Yabe, A.

PY - 1996

Y1 - 1996

U2 - 10.1143/JJAP.35.4110

DO - 10.1143/JJAP.35.4110

M3 - Article

SN - 1347-4065

VL - 35

SP - 4110

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 7R

ER -