Study of p-6P-Molecule Growth by In-Situ and Real-Time Spectroscopic Ellipsometry

Zhidan Yan, Lidong Sun, Peter Zeppenfeld, Chunguang Hu, Xiao Tang Hu

Research output: Contribution to journal › Article › peer-review

Fields of science

@article{645e7eedb9084f6e9c82ca30666b8d89,

title = "Study of p-6P-Molecule Growth by In-Situ and Real-Time Spectroscopic Ellipsometry",

author = "Zhidan Yan and Lidong Sun and Peter Zeppenfeld and Chunguang Hu and Hu, \{Xiao Tang\}",

year = "2013",

doi = "10.3139/120.110419",

language = "English",

volume = "55",

pages = "139",

journal = "Materials Testing",

issn = "2195-8572",

}