Structural investigation of Si/SiGe superlattices on vicinal (113) oriented Si

G. Abstreiter, Günther Bauer, K. Brunner, F. Ernst, J. Grim, Vaclav Holy, O. Kienzle, Julian Stangl, J. Zhu

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Fields of science

This output contributes to the following UN Sustainable Development Goals (SDGs)

@inproceedings{0e82ebcff58e4ccfb62801c31eec7863,

title = "Structural investigation of Si/SiGe superlattices on vicinal (113) oriented Si",

author = "G. Abstreiter and G{\"u}nther Bauer and K. Brunner and F. Ernst and J. Grim and Vaclav Holy and O. Kienzle and Julian Stangl and J. Zhu",

year = "1998",

language = "English",

booktitle = "Int. Proc. MRS Fall Meeting",

}