Structural investigation of Si/SiGe superlattices on vicinal (113) oriented Si

G. Abstreiter; Günther Bauer; K. Brunner; F. Ernst; J. Grim; Vaclav Holy; O. Kienzle; Julian Stangl; J. Zhu

doi:10.1016/s0040-6090(99)00478-2

Structural investigation of Si/SiGe superlattices on vicinal (113) oriented Si

G. Abstreiter
, Günther Bauer
, K. Brunner
, F. Ernst
, J. Grim
, Vaclav Holy
, O. Kienzle
, Julian Stangl
, J. Zhu

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	71-75
Number of pages	5
Journal	Thin Solid Films
Volume	357
Issue number	1
DOIs	https://doi.org/10.1016/s0040-6090(99)00478-2
Publication status	Published - 01 Dec 1999

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
103040 Photonics
202032 Photovoltaics
210006 Nanotechnology

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10.1016/s0040-6090(99)00478-2

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title = "Structural investigation of Si/SiGe superlattices on vicinal (113) oriented Si",

author = "G. Abstreiter and G{\"u}nther Bauer and K. Brunner and F. Ernst and J. Grim and Vaclav Holy and O. Kienzle and Julian Stangl and J. Zhu",

year = "1999",

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doi = "10.1016/s0040-6090(99)00478-2",

language = "English",

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T1 - Structural investigation of Si/SiGe superlattices on vicinal (113) oriented Si

AU - Abstreiter, G.

AU - Bauer, Günther

AU - Brunner, K.

AU - Ernst, F.

AU - Grim, J.

AU - Holy, Vaclav

AU - Kienzle, O.

AU - Stangl, Julian

AU - Zhu, J.

PY - 1999/12/1

Y1 - 1999/12/1

UR - https://www.scopus.com/pages/publications/0033340847

U2 - 10.1016/s0040-6090(99)00478-2

DO - 10.1016/s0040-6090(99)00478-2

M3 - Conference article

VL - 357

SP - 71

EP - 75

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1

ER -

Structural investigation of Si/SiGe superlattices on vicinal (113) oriented Si

Fields of science

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