@article{ae0aca055e204160bc3cba4d0071314e,
title = "Structural investigation of semiconductor nanostructures by x-ray techniques",
author = "Julian Stangl and Anke Hesse and T. Roch and Vaclav Holy and G{\"u}nther Bauer and Tobias Sch{\"u}lli and Metzger, \{Till Hartmut\}",
year = "2003",
month = jan,
doi = "10.1016/S0168-583X(02)01669-5",
language = "English",
volume = "200",
pages = "11--23",
journal = "Nuclear Instruments and Methods in Physics Research Section B",
issn = "1872-9584",
publisher = "Elsevier",
}