Stress in Evaporated and Sputtered Thin Films - A Comparison

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1973-1982
Number of pages	10
Journal	Surface and Coatings Technology
Volume	204
DOIs	https://doi.org/10.1016/j.surfcoat.2009.09.047
Publication status	Published - Mar 2010

Fields of science

@article{91cd90b4522b446bb2a018fbf78fcb1e,

title = "Stress in Evaporated and Sputtered Thin Films - A Comparison",

author = "Reinhold Koch",

year = "2010",

month = mar,

doi = "10.1016/j.surfcoat.2009.09.047",

language = "English",

volume = "204",

pages = "1973--1982",

journal = "Surface and Coatings Technology",

issn = "1879-3347",

}