Stress evolution during and after sputter deposition of thin Cu-Al alloy films

M. Pletea; H. Wendrock; R. Kaltofen; Oliver G. Schmidt; Reinhold Koch

doi:10.1088/0953-8984/20/25/255215

Stress evolution during and after sputter deposition of thin Cu-Al alloy films

M. Pletea, H. Wendrock, R. Kaltofen, Oliver G. Schmidt, Reinhold Koch

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	255215
Pages (from-to)	255215/1-6
Number of pages	6
Journal	Journal of Physics: Condensed Matter
Volume	20
Issue number	25
DOIs	https://doi.org/10.1088/0953-8984/20/25/255215
Publication status	Published - 25 Jun 2008

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
210006 Nanotechnology
103040 Photonics
202032 Photovoltaics

Access to Document

10.1088/0953-8984/20/25/255215

Cite this

@article{a0f787b31d60430099e6746c45fcf6b4,

title = "Stress evolution during and after sputter deposition of thin Cu-Al alloy films",

author = "M. Pletea and H. Wendrock and R. Kaltofen and Schmidt, \{Oliver G.\} and Reinhold Koch",

year = "2008",

month = jun,

day = "25",

doi = "10.1088/0953-8984/20/25/255215",

language = "English",

volume = "20",

pages = "255215/1--6",

journal = "Journal of Physics: Condensed Matter",

issn = "1361-648X",

publisher = "IOP Publishing Ltd",

number = "25",

}

TY - JOUR

T1 - Stress evolution during and after sputter deposition of thin Cu-Al alloy films

AU - Pletea, M.

AU - Wendrock, H.

AU - Kaltofen, R.

AU - Schmidt, Oliver G.

AU - Koch, Reinhold

PY - 2008/6/25

Y1 - 2008/6/25

UR - https://www.scopus.com/pages/publications/44649098296

U2 - 10.1088/0953-8984/20/25/255215

DO - 10.1088/0953-8984/20/25/255215

M3 - Article

SN - 1361-648X

VL - 20

SP - 255215/1-6

JO - Journal of Physics: Condensed Matter

JF - Journal of Physics: Condensed Matter

IS - 25

M1 - 255215

ER -

Stress evolution during and after sputter deposition of thin Cu-Al alloy films

Fields of science

Access to Document

Other files and links

Cite this