Original language | English |
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Pages (from-to) | 541-545 |
Number of pages | 5 |
Journal | Materials Science in Semiconductor Processing |
Volume | 9 |
Publication status | Published - 2006 |
Fields of science
- 103 Physics, Astronomy
- 103009 Solid state physics
- 103011 Semiconductor physics
- 103017 Magnetism
- 103018 Materials physics
- 103040 Photonics
- 202032 Photovoltaics
- 210006 Nanotechnology