Spectroscopic ellipsometry on metallic gratings

Michael Bergmair; Kurt Hingerl; Peter Zeppenfeld

doi:10.1007/978-3-642-33956-1_7

Spectroscopic ellipsometry on metallic gratings

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Ellipsometry at the Nanoscale
Editors	Univ.-Prof. Dr. Kurt Hingerl
Place of Publication	Heidelberg
Publisher	Springer
Pages	257
Number of pages	56
Volume	24
ISBN (Electronic)	9783642339561
ISBN (Print)	978-3-642-33955-4
DOIs	https://doi.org/10.1007/978-3-642-33956-1_7
Publication status	Published - Mar 2013

Fields of science

103020 Surface physics
103008 Experimental physics
103 Physics, Astronomy
210006 Nanotechnology
104014 Surface chemistry

JKU Focus areas

Nano-, Bio- and Polymer-Systems: From Structure to Function
Engineering and Natural Sciences (in general)

Access to Document

10.1007/978-3-642-33956-1_7

Cite this

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title = "Spectroscopic ellipsometry on metallic gratings",

author = "Michael Bergmair and Kurt Hingerl and Peter Zeppenfeld",

year = "2013",

month = mar,

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pages = "257",

editor = "\{Univ.-Prof. Dr. Kurt Hingerl\}",

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publisher = "Springer",

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TY - CHAP

T1 - Spectroscopic ellipsometry on metallic gratings

AU - Bergmair, Michael

AU - Hingerl, Kurt

AU - Zeppenfeld, Peter

PY - 2013/3

Y1 - 2013/3

UR - http://www.springer.com/engineering/book/978-3-642-33955-4

U2 - 10.1007/978-3-642-33956-1_7

DO - 10.1007/978-3-642-33956-1_7

M3 - Chapter

SN - 978-3-642-33955-4

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SP - 257

BT - Ellipsometry at the Nanoscale

A2 - Univ.-Prof. Dr. Kurt Hingerl, null

PB - Springer

CY - Heidelberg

ER -

Spectroscopic ellipsometry on metallic gratings

Fields of science

JKU Focus areas

Access to Document

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Cite this