Single-step patterning and the fabrication of contact masks by laser-induced forward transfer

L. Landström; J. Klimstein; Gernot Schrems; Klaus Piglmayer; Dieter Bäuerle

doi:10.1007/s00339-003-2375-2

Single-step patterning and the fabrication of contact masks by laser-induced forward transfer

L. Landström
, J. Klimstein
, Gernot Schrems
, Klaus Piglmayer
, Dieter Bäuerle

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	537-538
Number of pages	2
Journal	Applied Physics A
Volume	78
Issue number	4
DOIs	https://doi.org/10.1007/s00339-003-2375-2
Publication status	Published - Mar 2004

Fields of science

103016 Laser physics
210005 Nanophotonics

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10.1007/s00339-003-2375-2

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title = "Single-step patterning and the fabrication of contact masks by laser-induced forward transfer",

author = "L. Landstr{\"o}m and J. Klimstein and Gernot Schrems and Klaus Piglmayer and Dieter B{\"a}uerle",

year = "2004",

month = mar,

doi = "10.1007/s00339-003-2375-2",

language = "English",

volume = "78",

pages = "537--538",

journal = "Applied Physics A",

issn = "1432-0630",

publisher = "Springer Verlag",

number = "4",

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TY - JOUR

T1 - Single-step patterning and the fabrication of contact masks by laser-induced forward transfer

AU - Landström, L.

AU - Klimstein, J.

AU - Schrems, Gernot

AU - Piglmayer, Klaus

AU - Bäuerle, Dieter

PY - 2004/3

Y1 - 2004/3

UR - https://www.scopus.com/pages/publications/1242310507

U2 - 10.1007/s00339-003-2375-2

DO - 10.1007/s00339-003-2375-2

M3 - Article

SN - 1432-0630

VL - 78

SP - 537

EP - 538

JO - Applied Physics A

JF - Applied Physics A

IS - 4

ER -

Single-step patterning and the fabrication of contact masks by laser-induced forward transfer

Fields of science

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