Single-step fabrication of silicon-cone arrays

G. Wysocki, Richard Denk, Klaus Piglmayer, Nikita Arnold, Dieter Bäuerle

Research output: Contribution to journal › Article › peer-review

Fields of science

This output contributes to the following UN Sustainable Development Goals (SDGs)

@article{4b2641d0ffaa4b81854e88addc468f51,

title = "Single-step fabrication of silicon-cone arrays",

author = "G. Wysocki and Richard Denk and Klaus Piglmayer and Nikita Arnold and Dieter B{\"a}uerle",

year = "2003",

month = jan,

doi = "10.1063/1.1538347",

language = "English",

volume = "82",

pages = "692--693",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "5",

}