Single-pulse ultraviolet laser-induced surface modification and ablation of polyimide

Klaus Piglmayer; Enno Arenholz; Christoph Ortwein; Nikita Arnold; Dieter Bäuerle

doi:10.1063/1.122021

Single-pulse ultraviolet laser-induced surface modification and ablation of polyimide

Klaus Piglmayer, Enno Arenholz, Christoph Ortwein, Nikita Arnold, Dieter Bäuerle

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	847-849
Number of pages	3
Journal	Applied Physics Letters
Volume	73
Issue number	6
DOIs	https://doi.org/10.1063/1.122021
Publication status	Published - 1998

Fields of science

103016 Laser physics
210005 Nanophotonics

JKU Focus areas

Engineering and Natural Sciences (in general)

Access to Document

10.1063/1.122021

Cite this

@article{526054afeb6a40729aefe891a940c8b0,

title = "Single-pulse ultraviolet laser-induced surface modification and ablation of polyimide",

author = "Klaus Piglmayer and Enno Arenholz and Christoph Ortwein and Nikita Arnold and Dieter B{\"a}uerle",

year = "1998",

doi = "10.1063/1.122021",

language = "English",

volume = "73",

pages = "847--849",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "6",

}

TY - JOUR

T1 - Single-pulse ultraviolet laser-induced surface modification and ablation of polyimide

AU - Piglmayer, Klaus

AU - Arenholz, Enno

AU - Ortwein, Christoph

AU - Arnold, Nikita

AU - Bäuerle, Dieter

PY - 1998

Y1 - 1998

UR - https://www.scopus.com/pages/publications/0002822279

U2 - 10.1063/1.122021

DO - 10.1063/1.122021

M3 - Article

SN - 0003-6951

VL - 73

SP - 847

EP - 849

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

ER -

Single-pulse ultraviolet laser-induced surface modification and ablation of polyimide

Fields of science

JKU Focus areas

Access to Document

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Cite this