Simultaneous determination of composition and growth rate of MOCVD nitrides by in situ multiple wavelength ellipsometry

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@article{c4d0e15ac7a846818cc53f6c750582dc,

title = "Simultaneous determination of composition and growth rate of MOCVD nitrides by in situ multiple wavelength ellipsometry",

author = "Klaus Schmidegg and Alberta Bonanni and Helmut Sitter and Gerold Neuwirt",

year = "2005",

month = feb,

day = "15",

doi = "10.1016/j.jcrysgro.2004.11.192",

language = "English",

volume = "275",

pages = "e1763--e1766",

journal = "Journal of Crystal Growth",

issn = "1873-5002",

number = "1-2",

}

TY - JOUR

T1 - Simultaneous determination of composition and growth rate of MOCVD nitrides by in situ multiple wavelength ellipsometry

AU - Schmidegg, Klaus

AU - Bonanni, Alberta

AU - Sitter, Helmut

AU - Neuwirt, Gerold

PY - 2005/2/15

Y1 - 2005/2/15

UR - https://www.scopus.com/pages/publications/15844412248

U2 - 10.1016/j.jcrysgro.2004.11.192

DO - 10.1016/j.jcrysgro.2004.11.192

M3 - Conference article

SN - 1873-5002

VL - 275

SP - e1763-e1766

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-2

ER -