Simultaneous determination of composition and growth rate of MOCVD-growth ternary nitride compounds by multiple wavelength spectroscopic ellipsometry

Klaus Schmidegg; Alberta Bonanni; Helmut Sitter; Gerold Neuwirt

doi:10.1016/j.jcrysgro.2004.11.192

Simultaneous determination of composition and growth rate of MOCVD-growth ternary nitride compounds by multiple wavelength spectroscopic ellipsometry

Klaus Schmidegg, Alberta Bonanni, Helmut Sitter, Gerold Neuwirt

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	e1763-e1766
Number of pages	4
Journal	Journal of Crystal Growth
Volume	275 (1-2)
DOIs	https://doi.org/10.1016/j.jcrysgro.2004.11.192
Publication status	Published - 2005

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
210006 Nanotechnology
103040 Photonics
202032 Photovoltaics

Access to Document

10.1016/j.jcrysgro.2004.11.192

Cite this

@article{c4d0e15ac7a846818cc53f6c750582dc,

title = "Simultaneous determination of composition and growth rate of MOCVD-growth ternary nitride compounds by multiple wavelength spectroscopic ellipsometry",

author = "Klaus Schmidegg and Alberta Bonanni and Helmut Sitter and Gerold Neuwirt",

year = "2005",

doi = "10.1016/j.jcrysgro.2004.11.192",

language = "English",

volume = "275 (1-2)",

pages = "e1763--e1766",

journal = "Journal of Crystal Growth",

issn = "1873-5002",

}

TY - JOUR

T1 - Simultaneous determination of composition and growth rate of MOCVD-growth ternary nitride compounds by multiple wavelength spectroscopic ellipsometry

AU - Schmidegg, Klaus

AU - Bonanni, Alberta

AU - Sitter, Helmut

AU - Neuwirt, Gerold

PY - 2005

Y1 - 2005

U2 - 10.1016/j.jcrysgro.2004.11.192

DO - 10.1016/j.jcrysgro.2004.11.192

M3 - Article

SN - 1873-5002

VL - 275 (1-2)

SP - e1763-e1766

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

ER -