Simulation of Growth in Pyrolytic Laser-CVD of Microstructures - I. One-Dimensional Approach

Nikita Arnold; R. Kullmer; Dieter Bäuerle

doi:10.1016/0167-9317(93)90205-j

Simulation of Growth in Pyrolytic Laser-CVD of Microstructures - I. One-Dimensional Approach

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	31-41
Number of pages	11
Journal	Microelectronic Engineering
Volume	20
Issue number	1-2
DOIs	https://doi.org/10.1016/0167-9317(93)90205-j
Publication status	Published - Mar 1993

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

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10.1016/0167-9317(93)90205-j

Cite this

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title = "Simulation of Growth in Pyrolytic Laser-CVD of Microstructures - I. One-Dimensional Approach",

author = "Nikita Arnold and R. Kullmer and Dieter B{\"a}uerle",

year = "1993",

month = mar,

doi = "10.1016/0167-9317(93)90205-j",

language = "English",

volume = "20",

pages = "31--41",

journal = "Microelectronic Engineering",

issn = "1873-5568",

publisher = "ELSEVIER SCIENCE BV",

number = "1-2",

}

TY - JOUR

T1 - Simulation of Growth in Pyrolytic Laser-CVD of Microstructures - I. One-Dimensional Approach

AU - Arnold, Nikita

AU - Kullmer, R.

AU - Bäuerle, Dieter

PY - 1993/3

Y1 - 1993/3

UR - https://www.scopus.com/pages/publications/0027557450

U2 - 10.1016/0167-9317(93)90205-j

DO - 10.1016/0167-9317(93)90205-j

M3 - Article

SN - 1873-5568

VL - 20

SP - 31

EP - 41

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1-2

ER -

Simulation of Growth in Pyrolytic Laser-CVD of Microstructures - I. One-Dimensional Approach

Fields of science

JKU Focus areas

Access to Document

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