Shear strains in dry etched GaAs/AlAs wires studied by high resolution x-ray reciprocal space mapping

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@article{a7305392894d47e9b59203a536105b70,

title = "Shear strains in dry etched GaAs/AlAs wires studied by high resolution x-ray reciprocal space mapping",

author = "G{\"u}nther Bauer and Darhuber, \{A. A.\} and Torres, \{C.M. Sotomayor\} and P.D. Wang",

year = "1998",

doi = "10.1063/1.366709",

language = "English",

volume = "83",

pages = "126--131",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Shear strains in dry etched GaAs/AlAs wires studied by high resolution x-ray reciprocal space mapping

AU - Bauer, Günther

AU - Darhuber, A. A.

AU - Torres, C.M. Sotomayor

AU - Wang, P.D.

PY - 1998

Y1 - 1998

UR - https://www.scopus.com/pages/publications/11744375232

U2 - 10.1063/1.366709

DO - 10.1063/1.366709

M3 - Article

SN - 0021-8979

VL - 83

SP - 126

EP - 131

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -