Abstract
A sensor array for viscosity measurement includes the following: a carrier substrate formed with an opening; a metal plate-shaped oscillating element disposed on a surface of the carrier substrate and parallel to the surface over the opening; at least two metal contact electrodes disposed on the carrier substrate; at least two metal spring elements, wherein each of the contact electrodes is connected to the oscillating element by way of a spring element such that the element is mounted on the carrier substrate by way of the spring elements; and a magnet, which is disposed in the vicinity of the carrier substrate such that the magnetic field lines penetrate the plate-shaped oscillating element.
| Original language | English |
|---|---|
| Patent number | US9074981B2 |
| Publication status | Published - 07 Jul 2015 |
Fields of science
- 202028 Microelectronics
- 202027 Mechatronics
- 202019 High frequency engineering
- 202 Electrical Engineering, Electronics, Information Engineering
- 202037 Signal processing
- 203017 Micromechanics
- 502058 Digital transformation
- 202036 Sensor systems
- 202021 Industrial electronics
JKU Focus areas
- Digital Transformation