Abstract
Ultrasonic sensors can be used to determine physical fluid parameters like viscosity, density, and
speed of sound. In this contribution, we present the concept for an integrated sensor utilizing pressure waves
to sense the characteristic acoustic impedance of a fluid. We note that the basic setup generally allows to
determine the longitudinal viscosity and the speed of sound if it is operated in a resonant mode as will be
discussed elsewhere. In this contribution, we particularly focus on a modified setup where interferences are
suppressed by introducing a wedge reflector. This enables sensing of the liquid’s characteristic acoustic
impedance, which can serve as parameter in condition monitoring applications. We present a device model,
experimental results and their evaluation.
Original language | English |
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Pages (from-to) | 94-99 |
Number of pages | 6 |
Journal | Sensors and Actuators A: Physical |
Volume | 186 |
DOIs | |
Publication status | Published - Oct 2012 |
Fields of science
- 203017 Micromechanics
- 202019 High frequency engineering
- 202028 Microelectronics
- 202039 Theoretical electrical engineering
- 202037 Signal processing
- 202027 Mechatronics
- 202036 Sensor systems
JKU Focus areas
- Mechatronics and Information Processing