Screen Printed Thermal Flow Velocity Sensor for Microfluidic Devices Featuring Intrinsic Compensation of Spurious Heat Transfer

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Abstract

We present a fully screen printed sensor for measuring the flow velocity inside microfluidic chips based on a modified anemometer principle. In contrast to previously reported sensor concepts, this device is designed to automatically compensate for the spurious heat propagation in the substrate and heat conduction in the liquid of interest. Using this approach it is possible to measure the flow velocity of any liquid in a channel directly by means of a single voltage without the need to correct for thermal side effects in a post-processing step. Additionally, fabrication by screen printing allows for integration of the sensor without disturbing the fluid flow.
Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Editors IEEE
Pages2322-2325
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Fields of science

  • 202019 High frequency engineering
  • 202021 Industrial electronics
  • 202036 Sensor systems
  • 203017 Micromechanics
  • 202 Electrical Engineering, Electronics, Information Engineering
  • 202027 Mechatronics
  • 202028 Microelectronics
  • 202037 Signal processing

JKU Focus areas

  • Digital Transformation

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