Room temperature deposition of hydrogenated amorphous carbon films from laser-assisted photolytic CVD at 248 nm

M. Lindstam, Mats Boman, Klaus Piglmayer

Research output: Contribution to journal › Article › peer-review

Fields of science

@article{07d1fb53c8b442458e8f5c427791b089,

title = "Room temperature deposition of hydrogenated amorphous carbon films from laser-assisted photolytic CVD at 248 nm",

author = "M. Lindstam and Mats Boman and Klaus Piglmayer",

year = "2001",

month = jan,

doi = "10.1016/S0040-6090(01)01193-2",

language = "English",

volume = "394",

pages = "115",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Room temperature deposition of hydrogenated amorphous carbon films from laser-assisted photolytic CVD at 248 nm

AU - Lindstam, M.

AU - Boman, Mats

AU - Piglmayer, Klaus

PY - 2001/1

Y1 - 2001/1

U2 - 10.1016/S0040-6090(01)01193-2

DO - 10.1016/S0040-6090(01)01193-2

M3 - Article

SN - 0040-6090

VL - 394

SP - 115

JO - Thin Solid Films

JF - Thin Solid Films

ER -