Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors

Frieder Lucklum; Bernhard Jakoby; Peter Hauptmann; Nico F. de Rooij

doi:10.1109/FREQ.2006.275366

Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors

Frieder Lucklum, Bernhard Jakoby, Peter Hauptmann, Nico F. de Rooij

Institute of Microelectronics and Microsensors

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

The excitation of acoustic resonators is traditionally based on the piezoelectric effect. The alternative magnetic direct generation of acoustic waves is the basic operation principle of electromagnetic acoustic transducers (EMATs). For sensor applications this method can be applied to a mechanical resonator, thus enhancing the rather poor transduction efficiency by the high acoustic Q-factors. This principle has been theoretically investigated in FEM and PSpice simulations and practically applied to high-Q silicon membranes. The advantages of this non-piezoelectric sensor showing strong resonances with Q-factors up to 10^5 have been demonstrated. Sensor response to mass loading shows a Sauerbrey-like behavior suitable for sensing purposes.

Original language	English
Title of host publication	Proceedings of the 2006 IEEE International Frequency Control Symposium and Exposition, Miami, June 2006
Editors	IEEE
Pages	139-144
Number of pages	6
DOIs	https://doi.org/10.1109/FREQ.2006.275366
Publication status	Published - 2006

Publication series

Name	Proceedings of the IEEE International Frequency Control Symposium and Exposition

Fields of science

202036 Sensor systems

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10.1109/FREQ.2006.275366

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Lucklum, F., Jakoby, B., Hauptmann, P., & de Rooij, N. F. (2006). Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors. In IEEE (Ed.), Proceedings of the 2006 IEEE International Frequency Control Symposium and Exposition, Miami, June 2006 (pp. 139-144). Article 4053744 (Proceedings of the IEEE International Frequency Control Symposium and Exposition). https://doi.org/10.1109/FREQ.2006.275366

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title = "Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors",

abstract = "The excitation of acoustic resonators is traditionally based on the piezoelectric effect. The alternative magnetic direct generation of acoustic waves is the basic operation principle of electromagnetic acoustic transducers (EMATs). For sensor applications this method can be applied to a mechanical resonator, thus enhancing the rather poor transduction efficiency by the high acoustic Q-factors. This principle has been theoretically investigated in FEM and PSpice simulations and practically applied to high-Q silicon membranes. The advantages of this non-piezoelectric sensor showing strong resonances with Q-factors up to 10^5 have been demonstrated. Sensor response to mass loading shows a Sauerbrey-like behavior suitable for sensing purposes.",

author = "Frieder Lucklum and Bernhard Jakoby and Peter Hauptmann and {de Rooij}, {Nico F.}",

year = "2006",

doi = "10.1109/FREQ.2006.275366",

language = "English",

isbn = "1424400740",

series = "Proceedings of the IEEE International Frequency Control Symposium and Exposition",

pages = "139--144",

editor = "IEEE",

booktitle = "Proceedings of the 2006 IEEE International Frequency Control Symposium and Exposition, Miami, June 2006",

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Lucklum, F, Jakoby, B, Hauptmann, P & de Rooij, NF 2006, Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors. in IEEE (ed.), Proceedings of the 2006 IEEE International Frequency Control Symposium and Exposition, Miami, June 2006., 4053744, Proceedings of the IEEE International Frequency Control Symposium and Exposition, pp. 139-144. https://doi.org/10.1109/FREQ.2006.275366

Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors. / Lucklum, Frieder; Jakoby, Bernhard; Hauptmann, Peter et al.
Proceedings of the 2006 IEEE International Frequency Control Symposium and Exposition, Miami, June 2006. ed. / IEEE. 2006. p. 139-144 4053744 (Proceedings of the IEEE International Frequency Control Symposium and Exposition).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors

AU - Lucklum, Frieder

AU - Jakoby, Bernhard

AU - Hauptmann, Peter

AU - de Rooij, Nico F.

PY - 2006

Y1 - 2006

N2 - The excitation of acoustic resonators is traditionally based on the piezoelectric effect. The alternative magnetic direct generation of acoustic waves is the basic operation principle of electromagnetic acoustic transducers (EMATs). For sensor applications this method can be applied to a mechanical resonator, thus enhancing the rather poor transduction efficiency by the high acoustic Q-factors. This principle has been theoretically investigated in FEM and PSpice simulations and practically applied to high-Q silicon membranes. The advantages of this non-piezoelectric sensor showing strong resonances with Q-factors up to 10^5 have been demonstrated. Sensor response to mass loading shows a Sauerbrey-like behavior suitable for sensing purposes.

AB - The excitation of acoustic resonators is traditionally based on the piezoelectric effect. The alternative magnetic direct generation of acoustic waves is the basic operation principle of electromagnetic acoustic transducers (EMATs). For sensor applications this method can be applied to a mechanical resonator, thus enhancing the rather poor transduction efficiency by the high acoustic Q-factors. This principle has been theoretically investigated in FEM and PSpice simulations and practically applied to high-Q silicon membranes. The advantages of this non-piezoelectric sensor showing strong resonances with Q-factors up to 10^5 have been demonstrated. Sensor response to mass loading shows a Sauerbrey-like behavior suitable for sensing purposes.

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M3 - Conference proceedings

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T3 - Proceedings of the IEEE International Frequency Control Symposium and Exposition

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BT - Proceedings of the 2006 IEEE International Frequency Control Symposium and Exposition, Miami, June 2006

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Lucklum F, Jakoby B, Hauptmann P, de Rooij NF. Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors. In IEEE, editor, Proceedings of the 2006 IEEE International Frequency Control Symposium and Exposition, Miami, June 2006. 2006. p. 139-144. 4053744. (Proceedings of the IEEE International Frequency Control Symposium and Exposition). doi: 10.1109/FREQ.2006.275366

Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors

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