Reaction Kinetics and Simulation of Growth in Pyrolytic Laser-Induced Chemical Vapor Deposition

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Laser Chemistry of Organometallics
Editors	J. Chaiken
Publisher	American Chemical Society
Pages	250
Number of pages	23
Volume	530
Publication status	Published - 1993

Name	ACS Symposium Series

Fields of science

@inproceedings{564cc8dbaf164135925ae8b267a5367e,

title = "Reaction Kinetics and Simulation of Growth in Pyrolytic Laser-Induced Chemical Vapor Deposition",

author = "Dieter B{\"a}uerle and Nikita Arnold and R. Kullmer",

year = "1993",

language = "English",

volume = "530",

series = "ACS Symposium Series",

publisher = "American Chemical Society",

pages = "250",

editor = "\{J. Chaiken\}",

booktitle = "Laser Chemistry of Organometallics",

}

Reaction Kinetics and Simulation of Growth in Pyrolytic Laser-Induced Chemical Vapor Deposition. / Bäuerle, Dieter ; Arnold, Nikita; Kullmer, R.
Laser Chemistry of Organometallics. ed. / J. Chaiken. Vol. 530 American Chemical Society, 1993. p. 250 (ACS Symposium Series).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review