Range of ion-implanted rare earth elements in Si and SiO2

Leopold Palmetshofer, M. Gritsch, G. Hobler

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	83-85
Number of pages	3
Journal	Materials Science and Engineering B
Volume	81
Issue number	1-3
Publication status	Published - 2001

Fields of science

@article{b8e0b51f9ec044deb6eeeea9fb27f130,

title = "Range of ion-implanted rare earth elements in Si and SiO2",

author = "Leopold Palmetshofer and M. Gritsch and G. Hobler",

year = "2001",

language = "English",

volume = "81",

pages = "83--85",

journal = "Materials Science and Engineering B",

publisher = "Elsevier Science",

number = "1-3",

}