Raman spectroscopy determination of composition and strain in Si1-xGex/Si heterostructures

Fabio Pezzoli; E. Bonera; E. Grilli; M. Guzzi; S. Sanguinetti; Daniel Chrastina; G. Isella; H. von Känel; Eugen Wintersberger; Julian Stangl; Günther Bauer

Raman spectroscopy determination of composition and strain in Si1-xGex/Si heterostructures

Fabio Pezzoli
, E. Bonera
, E. Grilli
, M. Guzzi
, S. Sanguinetti
, Daniel Chrastina
, G. Isella
, H. von Känel
, Eugen Wintersberger
, Julian Stangl
, Günther Bauer

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	279-284
Number of pages	6
Journal	Materials Science in Semiconductor Processing
Volume	11
Publication status	Published - 2008

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
103040 Photonics
202032 Photovoltaics
210006 Nanotechnology

Cite this

@article{4e62b80185cc4259a2b53c1192ac4ff6,

title = "Raman spectroscopy determination of composition and strain in Si1-xGex/Si heterostructures",

author = "Fabio Pezzoli and E. Bonera and E. Grilli and M. Guzzi and S. Sanguinetti and Daniel Chrastina and G. Isella and \{von K{\"a}nel\}, H. and Eugen Wintersberger and Julian Stangl and G{\"u}nther Bauer",

year = "2008",

language = "English",

volume = "11",

pages = "279--284",

journal = "Materials Science in Semiconductor Processing",

issn = "1369-8001",

}

TY - JOUR

T1 - Raman spectroscopy determination of composition and strain in Si1-xGex/Si heterostructures

AU - Pezzoli, Fabio

AU - Bonera, E.

AU - Grilli, E.

AU - Guzzi, M.

AU - Sanguinetti, S.

AU - Chrastina, Daniel

AU - Isella, G.

AU - von Känel, H.

AU - Wintersberger, Eugen

AU - Stangl, Julian

AU - Bauer, Günther

PY - 2008

Y1 - 2008

M3 - Article

SN - 1369-8001

VL - 11

SP - 279

EP - 284

JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

ER -