Raman spectroscopy determination of composition and strain in Si1-xGex/Si heterostructures

Fabio Pezzoli; E. Bonera; E. Grilli; M. Guzzi; S. Sanguinetti; Daniel Chrastina; G. Isella; H. von Känel; Eugen Wintersberger; Julian Stangl; Günther Bauer

Raman spectroscopy determination of composition and strain in Si1-xGex/Si heterostructures

Fabio Pezzoli
, E. Bonera
, E. Grilli
, M. Guzzi
, S. Sanguinetti
, Daniel Chrastina
, G. Isella
, H. von Känel
, Eugen Wintersberger
, Julian Stangl
, Günther Bauer

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	279-284
Number of pages	6
Journal	Materials Science in Semiconductor Processing
Volume	11
Publication status	Published - 2008

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
103040 Photonics
202032 Photovoltaics
210006 Nanotechnology

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

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title = "Raman spectroscopy determination of composition and strain in Si1-xGex/Si heterostructures",

author = "Fabio Pezzoli and E. Bonera and E. Grilli and M. Guzzi and S. Sanguinetti and Daniel Chrastina and G. Isella and \{von K{\"a}nel\}, H. and Eugen Wintersberger and Julian Stangl and G{\"u}nther Bauer",

year = "2008",

language = "English",

volume = "11",

pages = "279--284",

journal = "Materials Science in Semiconductor Processing",

issn = "1369-8001",

}

TY - JOUR

T1 - Raman spectroscopy determination of composition and strain in Si1-xGex/Si heterostructures

AU - Pezzoli, Fabio

AU - Bonera, E.

AU - Grilli, E.

AU - Guzzi, M.

AU - Sanguinetti, S.

AU - Chrastina, Daniel

AU - Isella, G.

AU - von Känel, H.

AU - Wintersberger, Eugen

AU - Stangl, Julian

AU - Bauer, Günther

PY - 2008

Y1 - 2008

M3 - Article

SN - 1369-8001

VL - 11

SP - 279

EP - 284

JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

ER -