Raman Diagnostics of CVD Systems: Determination of Local Temperatures

Günter Leyendecker; Josef Doppelbauer; Dieter Bäuerle; P. Geittner; H. Lydtin

doi:10.1007/BF00614773

Raman Diagnostics of CVD Systems: Determination of Local Temperatures

Günter Leyendecker
, Josef Doppelbauer
, Dieter Bäuerle
, P. Geittner
, H. Lydtin

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	237-243
Number of pages	7
Journal	Applied Physics A
Volume	30
Issue number	4
DOIs	https://doi.org/10.1007/BF00614773
Publication status	Published - Apr 1983

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

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10.1007/BF00614773

Cite this

@article{f301244d837a492d9234727fdbb63b62,

title = "Raman Diagnostics of CVD Systems: Determination of Local Temperatures",

author = "G{\"u}nter Leyendecker and Josef Doppelbauer and Dieter B{\"a}uerle and P. Geittner and H. Lydtin",

year = "1983",

month = apr,

doi = "10.1007/BF00614773",

language = "English",

volume = "30",

pages = "237--243",

journal = "Applied Physics A",

issn = "1432-0630",

publisher = "Springer Verlag",

number = "4",

}

TY - JOUR

T1 - Raman Diagnostics of CVD Systems: Determination of Local Temperatures

AU - Leyendecker, Günter

AU - Doppelbauer, Josef

AU - Bäuerle, Dieter

AU - Geittner, P.

AU - Lydtin, H.

PY - 1983/4

Y1 - 1983/4

UR - https://www.scopus.com/pages/publications/0020735359

U2 - 10.1007/BF00614773

DO - 10.1007/BF00614773

M3 - Article

SN - 1432-0630

VL - 30

SP - 237

EP - 243

JO - Applied Physics A

JF - Applied Physics A

IS - 4

ER -

Raman Diagnostics of CVD Systems: Determination of Local Temperatures

Fields of science

JKU Focus areas

Access to Document

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Cite this