Quantitative optical recognition of highly reproducible ultrathin oxide films in microelectrochemical anodization

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Abstract

Automatized microelectrochemical investigations are achieved using a scanning droplet cell. The area reproducibility for a 100 mum oxide spot is found to be better than 1%, a value typically difficult to reach even in macroscopic samples. A systematic change in color appearance is seen for oxide films with a thickness ranging from 14 to 27 nm. Analysis of optical images yields a strictly linear relation between relative transmission and anodization charge and thus allows determination of the oxide thickness with a remarkable precision better than 0.5 nm at an absolute film thickness value that is at least a factor of 20 smaller than the wavelength of light.
Original languageEnglish
Article number046106
Pages (from-to)046106 1-3
Number of pages3
JournalReview of Scientific Instruments
Volume80
Issue number4
DOIs
Publication statusPublished - Apr 2009

Fields of science

  • 104005 Electrochemistry
  • 104006 Solid state chemistry
  • 104014 Surface chemistry
  • 104017 Physical chemistry
  • 105113 Crystallography
  • 105116 Mineralogy
  • 503013 Subject didactics of natural sciences
  • 204 Chemical Process Engineering
  • 204001 Inorganic chemical technology
  • 205016 Materials testing
  • 210006 Nanotechnology
  • 211104 Metallurgy

JKU Focus areas

  • Engineering and Natural Sciences (in general)

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