Pyrolytic Laser-Induced Chemical Vapor Deposition (LCVD) of Microstructures

Tamas Szörényi, Klaus Piglmayer, Dieter Bäuerle

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Trends in Quantum Electronics
Pages	319
Number of pages	9
Volume	1033
DOIs	https://doi.org/10.1117/12.950634
Publication status	Published - 1989

Name	Proceedings of SPIE - The International Society for Optical Engineering

Fields of science

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title = "Pyrolytic Laser-Induced Chemical Vapor Deposition (LCVD) of Microstructures",

author = "Tamas Sz{\"o}r{\'e}nyi and Klaus Piglmayer and Dieter B{\"a}uerle",

year = "1989",

doi = "10.1117/12.950634",

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volume = "1033",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

pages = "319",

booktitle = "Trends in Quantum Electronics",

}

TY - GEN

T1 - Pyrolytic Laser-Induced Chemical Vapor Deposition (LCVD) of Microstructures

AU - Szörényi, Tamas

AU - Piglmayer, Klaus

AU - Bäuerle, Dieter

PY - 1989

Y1 - 1989

U2 - 10.1117/12.950634

DO - 10.1117/12.950634

M3 - Conference proceedings

VL - 1033

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 319

BT - Trends in Quantum Electronics

ER -