Pyrolytic Laser Induced Chemical Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Laser Chemical Processing of Semiconductor Devices
Editors	F. Houle, T.F. Deutsch, R.M. Osgood
Publisher	Materials Research Society, Boston 1984
Pages	59
Number of pages	16
Publication status	Published - 1984

Name	Proc. Materials Research Society

Fields of science

@inproceedings{f761371bb5364a62a022c37c90a8de24,

title = "Pyrolytic Laser Induced Chemical Processing",

author = "Dieter B{\"a}uerle",

year = "1984",

language = "English",

series = "Proc. Materials Research Society",

publisher = "Materials Research Society, Boston 1984",

pages = "59",

editor = "\{F. Houle, T.F. Deutsch, R.M. Osgood\}",

booktitle = "Laser Chemical Processing of Semiconductor Devices",

}