TY - JOUR
T1 - Prospects for SiGe thermoelectric generators
AU - Samarelli, Antonio
AU - Ferre-LLin, Lourdes
AU - Cecchi, Stefano
AU - Frigerio, J.
AU - Chrastina, Daniel
AU - Isella, G.
AU - Müller-Gubler, Elisabeth
AU - Etzelstorfer, Tanja
AU - Stangl, Julian
AU - Zhang, Yuan
AU - Weaver, J.M.R.
AU - Dobson, P.
AU - Paul, Douglas J.
PY - 2014
Y1 - 2014
N2 - Thermoelectric materials are one potential technology that could be used for energy harvesting. Here we report results from nanoscale Ge/SiGe heterostructure materials grown on Si substrates designed to enhance the thermoelectric performance over bulk materials at room temperature. The materials and devices are aimed at integrated energy harvesters for autonomous sensing applications. We report Seebeck coefficients up to 279.5 ± 1.2 μμV/K at room temperature with electrical conductivities of 77,200 S/m which produce a high power factor of 6.02 ± 0.05 mW m−1 K−2 and a ZT of 0.135 ± 0.074 at room temperature. Methods for microfabricating modules will be described along with the first demonstration of power output from flip-chip bonded SiGe legs.
Keywords
AB - Thermoelectric materials are one potential technology that could be used for energy harvesting. Here we report results from nanoscale Ge/SiGe heterostructure materials grown on Si substrates designed to enhance the thermoelectric performance over bulk materials at room temperature. The materials and devices are aimed at integrated energy harvesters for autonomous sensing applications. We report Seebeck coefficients up to 279.5 ± 1.2 μμV/K at room temperature with electrical conductivities of 77,200 S/m which produce a high power factor of 6.02 ± 0.05 mW m−1 K−2 and a ZT of 0.135 ± 0.074 at room temperature. Methods for microfabricating modules will be described along with the first demonstration of power output from flip-chip bonded SiGe legs.
Keywords
UR - http://www.sciencedirect.com/science/article/pii/S0038110114000513
U2 - 10.1016/j.sse.2014.04.003
DO - 10.1016/j.sse.2014.04.003
M3 - Article
SN - 1879-2405
VL - 98
SP - 70
EP - 74
JO - Solid-State Electronics
JF - Solid-State Electronics
ER -