Production of Microstructures by Laser Pyrolysis

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Proc. MRS Symp. "Laser Diagnostics and Photochemical Processing for Semiconductor Devices"
Editors	R.M. Osgood et al.
Publisher	Elsevier-North Holland
Pages	19
Number of pages	17
Volume	17
Publication status	Published - 1983

Name	Proc. MRS Symp.

Fields of science

@inproceedings{3a723f23b0ef424aa8a2f58972382548,

title = "Production of Microstructures by Laser Pyrolysis",

author = "Dieter B{\"a}uerle",

year = "1983",

language = "English",

volume = "17",

series = "Proc. MRS Symp.",

publisher = "Elsevier-North Holland",

pages = "19",

editor = "\{R.M. Osgood et al.\}",

booktitle = "Proc. MRS Symp. {"}Laser Diagnostics and Photochemical Processing for Semiconductor Devices{"}",

}