Production of Microstructures by Laser Pyrolysis

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Proc. MRS Symp. "Laser Diagnostics and Photochemical Processing for Semiconductor Devices"
Editors	R.M. Osgood et al.
Publisher	Elsevier North Holland
Pages	19
Number of pages	17
Volume	17
Publication status	Published - 1983

Name	Proc. MRS Symp.

Fields of science

@inproceedings{3a723f23b0ef424aa8a2f58972382548,

title = "Production of Microstructures by Laser Pyrolysis",

author = "Dieter B{\"a}uerle",

year = "1983",

language = "English",

volume = "17",

series = "Proc. MRS Symp.",

publisher = "Elsevier North Holland",

pages = "19",

editor = "{R.M. Osgood et al.}",

booktitle = "Proc. MRS Symp. {"}Laser Diagnostics and Photochemical Processing for Semiconductor Devices{"}",

}