Plasma-deposited parylene-like thin films: process and material properties

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	124 - 130
Number of pages	7
Journal	Surface and Coatings Technology
Volume	174-175
DOIs	https://doi.org/10.1016/s0257-8972(03)00329-3
Publication status	Published - 2003

Fields of science

@article{77c1f52eca9144699ef15587a80065ec,

title = "Plasma-deposited parylene-like thin films: process and material properties",

author = "Bogdana Mitu and Leonhartsberger, \{Johann Georg\} and Simona Bauer-Gogonea and Siegfried Bauer and Gheorghe Dinescu and Michael Lindner",

year = "2003",

doi = "10.1016/s0257-8972(03)00329-3",

language = "English",

volume = "174-175",

pages = "124 -- 130",

journal = "Surface and Coatings Technology",

issn = "1879-3347",

}

TY - JOUR

T1 - Plasma-deposited parylene-like thin films: process and material properties

AU - Mitu, Bogdana

AU - Leonhartsberger, Johann Georg

AU - Bauer-Gogonea, Simona

AU - Bauer, Siegfried

AU - Dinescu, Gheorghe

AU - Lindner, Michael

PY - 2003

Y1 - 2003

UR - https://www.scopus.com/pages/publications/18544409090

U2 - 10.1016/s0257-8972(03)00329-3

DO - 10.1016/s0257-8972(03)00329-3

M3 - Article

SN - 1879-3347

VL - 174-175

SP - 124

EP - 130

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -